Reduced resistance short-channel InGaAs planar MOSFET

摘要

A metal-oxide-semiconductor field effect transistor (MOSFET) and a method of fabricating a MOSFET are described. The method includes depositing and patterning a dummy gate stack above an active channel layer formed on a base. The method also includes selectively etching the active channel layer leaving a remaining active channel layer, and epitaxially growing silicon doped active channel material adjacent to the remaining active channel layer.

主权项

1. A method of fabricating a metal-oxide-semiconductor field effect transistor (MOSFET), the method comprising:
forming a base by depositing a buried insulator layer on a substrate; forming an active channel layer on the base, the active channel layer comprising Indium Gallium Arsenide (InGaAs); depositing and patterning a dummy gate stack above a portion of the active channel layer formed on the base, the dummy gate stack including a dielectric or amorphous silicon layer; selectively etching the active channel layer leaving a remaining active channel layer, the selectively etching including undercutting to etch some of the active channel layer between the dummy gate stack and the base; performing a p-type ion implantation in the buried insulator after the selectively etching the active channel layer; epitaxially growing silicon doped active channel material on the base adjacent to the remaining active channel layer after the performing the p-type ion implantation, the epitaxially growing the silicon doped active channel material being based on metal-organic chemical vapor deposition (MOCVD) and the epitaxially growing the silicon doped active channel material including growing the silicon doped active channel material to a thickness greater than a thickness of the remaining active channel layer.