RESONANT TYPE HIGH FREQUENCY POWER SUPPLY DEVICE AND SWITCHING CIRCUIT FOR RESONANT TYPE HIGH FREQUENCY POWER SUPPLY DEVICE

摘要

A resonant type high frequency power supply device provided with a power semiconductor element that performs a switching operation, the resonant type high frequency power supply device including a high frequency pulse drive circuit that transmits a pulse-shaped voltage signal having a high frequency exceeding 2 MHz to the power semiconductor element to drive the above-mentioned power semiconductor element, a variable pulse signal generating circuit that transmits a pulse-shaped voltage signal having a high frequency exceeding 2 MHz to the high frequency pulse drive circuit to drive the above-mentioned high frequency pulse drive circuit, and a bias power supply circuit that supplies driving power to both the variable pulse signal generating circuit and the high frequency pulse drive circuit.

主权项

1. A resonant type high frequency power supply device provided with a power semiconductor element that performs a switching operation, said resonant type high frequency power supply device comprising:
a high frequency pulse drive circuit that transmits a pulse-shaped voltage signal having a high frequency exceeding 2 MHz to said power semiconductor element to drive said power semiconductor element; a variable pulse signal generating circuit that transmits a pulse-shaped voltage signal having a high frequency exceeding 2 MHz to said high frequency pulse drive circuit to drive said high frequency pulse drive circuit; and a bias power supply circuit that supplies driving power to both said variable pulse signal generating circuit and said high frequency pulse drive circuit.