| 摘要 |
<p>PURPOSE:To improve liquid dripping performance in a liquid chemical treating process and rinsing process by making V-shaped or inverse V-shaped windows in a region other than the left and right edges of a grooved side plate and forming a beam part divided by the windows also in V-shape or inverse V-shape. CONSTITUTION:Windows 2X in V-shape or inverse V-shape are provided in a region other than the left and right edges of a grooved side plate 2 in a side view of a cassette, and beams 2Y divided by the windows 2X are formed into V-shape or inverse V-shape corresponding to the shape of the windows 2X. Consequently, upon taking the cassette out of a liquid bath such as a liquid chemical bath or a rinsing bath, liquid attached to the grooved side plate 2 flows to the bottom of the V-shape of the beam 2Y or to the opposite lower ends of the inverse V-shape, then, drips down rapidly. This improves the liquid dripping property in a liquid chemical treating process and a rinsing process.</p> |
