| 摘要 |
PURPOSE:To clean dust, which enters into a vessel and adheres, easily, and to improve the degree of washing by forming through-holes oppositely faced to a housed substrate and fitting grooves, to which the end sections of plate members closing the through-holes inserted from the side of a main body, to the top face and base of the main body and mounting the plate members to the top face and the base. CONSTITUTION:A square-shaped through-hole 25 oppositely faced to the underside of a housed substrate 1 is bored to a main-body main section 23, and a square-shaped plate member 26 closing the through-hole 25 is fitted and supported to a groove 27 formed in the direction of the periphery 3 of the through-hole 25. A square-shaped through-hole 28 oppositely faced to the top face of the housed substrate 1 is bored to a main-body cover section 24, and a square-shaped plate member 29 closing the through-hole 28 is fitted and supported to a groove 30 formed in the direction of the periphery 3 of the through-hole 28. The grooves 27 and 30 are composed of L-shaped projections 31 integrally formed with the main section 23 or the cover section 24, and the noses of the L-shaped projections 31 push the plate members 26, 29, thus preventing the slip-offs of the plate members 26, 29 when a substrate housing container 21 is moved. Accordingly, constitution in which the container is covered with the plate members, the through-holes of which are removed easily, is shaped, thus readily washing the substrate housing container. |
