摘要 |
PURPOSE:To reduce hysteresis of output characteristics by so providing a distributor for applying a voltage to both piezoelectric elements that the ends of the other arms of a displacement enlarging mechanism are operated in reverse phase to one another. CONSTITUTION:150V is applied to one of two piezoelectric elements 1, simply stepped down, and the other is simply stepped up from 0V to 150V. In this case, the voltage stepping up and down are conducted in the same amplitude at the same speed. That is, the voltage of a power source 5 is so once applied to the elements 1 through a distributor 6 that the sum of both the applied voltages becomes constant. In this case, the power source voltage is distributed by using a 3-terminal semifixed resistor most simply. When the voltage is applied in this manner, if the time function of the voltage is, for example, a sine wave, the arms of two U-shaped beams 2 of the output terminal side of a piezoelectric actuator with a displacement amplifying mechanism are operated in reverse phases to one another. Accordingly, a junction beam 3 for connecting the two arms is linearly moved with respect to variation amounts of the applied voltages of the elements 1. |