SEMICONDUCTOR WAFER SUPPORT RACK

摘要

PURPOSE:To prevent pollution of wafers by a construction wherein a rack is so constructed as to support the wafers by one set of two wafer holders having a plurality of V-shaped grooves provided at prescribed pitches, the width of the groove bottom of each V-shaped groove is made smaller than the thickness of each wafer and the V-shaped groove is so shaped in the length direction as to have a curvature enabling contact thereof with the circumference of the wafer and to have the center of the curvature. CONSTITUTION:Two bar shaped wafer holders 8 each having a plurality of V-shaped grooves 7 juxtaposed at prescribed pitches are provided in parallel oppositely to each other, and the two wafer holders are joined in one body at each one end thereof by a joining member 9. The section in the length direction of the V-shaped groove 7 is so shaped as to have a curvature enabling contact thereof with the circumference 3' of a wafer and the center of the curvature, while the width of the groove bottom of the V-shaped groove 7 is made smaller than the thickness of the wafer 3. Besides, the wafer holders 8 are set oppositely in positions wherein they are symmetric substantially on the right and the left in relation to the wafer. Spacing between the wafer holders 8 is set in a range of 50 deg. to 120 deg. in conversion into the central angle of the wafer, while the width of each wafer holder is set in a range of 10 deg. to 20 deg. in conversion into the central angle of the wafer. According to this constitution, the wafer can be prevented from pollution without obstructing a flow passage along which a treatment liquid is injected into a treatment bath.