| 摘要 |
<p>The invention provides an apparatus for depositing particulate or powder-like material on the surface of a substrate. The apparatus comprises a hollow tube-like chamber consisting of a heat-resistant material, in which a plasma torch is generated. By means of a device for supplying solid particulate or powder-like material, the material is molten in the plasma torch and deposited on the surface of the substrate. In order to achieve a uniform temperature distribution in the plasma torch, the apparatus comprises at least two induction coils located at the outer surface of the hollow tube-like member and a high frequency generator means having at least two generator sections. A first of the at least two generator sections generates energy with a first higher frequency and a second of the at least two generator sections generates energy with a second lower frequency. One of said at least two induction coils are connected to the first generator section and another one of the at least two induction coils are connected to the second generator section.</p> |
