| 摘要 |
<p>PURPOSE:To obtain a uniform and continuous thin-film resistor having a proper resistance value by composing this thin-film resistor mainly of Ru, O and an element which forms an oxide of rutile type structure. CONSTITUTION:A thin-film resistor is composed of Ru, O and an element which forms an oxide of rutile type structure. Then, a PVD method or a MOD method, in which a thin film is formed by coating an organic metal, followed by calcining, is used.</p> |
