| 摘要 |
PURPOSE:To allow the strict measurement management and control of the concn. of PO2 in an ultra-low concn. region by providing an arithmetic unit which computes the concn. of the PO2 from the output of a zirconia cell and the temp. of the zirconia cell and discretely outputs the mantissa part and exponent part thereof. CONSTITUTION:The output of the zirconia cell 4 is amplified by an amplifier 5 and is directly outputted as the output of the cell 4 and is, in the meantime, subjected to A/D conversion 6. The temp. of the cell 4 is detected by a thermocouple 7 and the output thereof is also amplified by an amplifier 8 and is converted 6. The converted 6 oxygen concn. signal and temp. signal are inputted to the arithmetic unit 9 which computes the value of the concn. of the PO2, determines the mantissa part and exponent part of the results of the computation and discretely outputs the mantissa part and exponent part by digital signals. The output signal of the mantissa part is subjected to D/A conversion 11. The concn. of the PO2 in the oxygen atmosphere of an ultra-low concn. is measured by one system of the output system. |
