摘要 |
A clear, transparent container is filled with a molecular sieve of 10 angstrom pore size. A vacuum is drawn on the interior of the container to extract purified SF6 therefrom. Contaminated SF6 is then loaded into the evacuated sieve for the next purifying cycle. A light gas exhaust valve is provided at the top of the container. When the sieve is loaded with moisture and contaminants, the molecular sieve material is replaced.
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