SYSTEM FOR EXPOSING PHOTOSENSITIVE SURFACE WITH VARIABLE ELECTRON BEAM,申请号JP19780010378-传众专利搜索

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发明名称	SYSTEM FOR EXPOSING PHOTOSENSITIVE SURFACE WITH VARIABLE ELECTRON BEAM
摘要
申请公布号	JPS5399876(A)	申请公布日期	1978.08.31
申请号	JP19780010378	申请日期	1978.01.31
申请人	BURROUGHS CORP	发明人	JIYON EDOMONDO UORUFU
分类号	H01J37/21;H01J37/30;H01J37/304;H01J37/305;H01L21/027	主分类号	H01J37/21
代理机构		代理人
主权项
地址

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