| 摘要 |
PURPOSE:To prevent the positional deviation of a horn induced by thermal expansion of an ultrasonic horn by detecting the amount of elongation of the ultrasonic horn and correcting bonding positions. CONSTITUTION:A detector 13, which is designed to detect the tip position of an ultrasonic horn 6, uses the reflection of laser, for example, and transmits detected data to a control device 10. Correction is input so that the coordinates (X, Y) calculated by a recognition device 9 may agree with the coordinates (X, Y) used by the control device 10. At that time, the tip position of the horn is measured by the detector 13 under the condition where the ultrasonic horn 6 is suspended at a certain position A. Then, after repeated bonding, the tip position of the horn is measured by the detector 13 under the condition where the ultrasonic horn 6 is suspended at the position A once again. If the horn is elongated, the amount of elongation is determined, and the movement of the XY table is corrected by the control device 10 so that bonding may be carried out. |
