| 摘要 |
PURPOSE:To decrease the coercive force in the difficult axis direction of a magnetic film applicable to a thin film magnetic head and to increase reading- out capacity by controlling the average crystal grain size of the film. CONSTITUTION:The film having the small coercive force has the large average crystal grain size. More specifically, the average crystal grain size of an NiFe film formed on a glass substrate is preferably specified to >=0.1mum and <=0.5mum in order to maintain <=10e coercive force in the difficult axis direction which is the essential requirement for the magnetic film for the magnetic pole of the thin film magnetic head in the relation between the average crystal grain size of the NiFe film and the coercive force in the difficult axis direction. Such grain size is attained by increasing the film forming speed to >=20Angstrom /S to obtain >=0.1mum average crystal grain size of the sputtered film and regulating the sputtering gaseous pressure to obtain <=0.5mum average crystal grain size. |
