| 摘要 |
<p>PURPOSE:To obtain an apparatus which can prevent cross contamination by providing a plurality of push-up members and holding and conveying members, respectively, specially using the respective members for mounting predetermined substrates for treatment, and separately using each push-up member and each holding and conveying member for the respective purposes. CONSTITUTION:Pushing members 62 push-up substrates for treatment which are contained in a container upward from the lower part of the container. Holding and conveying members 48 hold and convey the substrates which are pushed up with the pushing-up members 62. These members are provided in a substrate moving and mounting apparatus. A plurality of the push-up members 62 and a plurality of the holding and conveying members 48 are provided so that the respective members are specially used for mounting the predetermined substrates for treatment. Each push-up member 62 and each holding and conveying member 48 are separately used for the purposes. For example, a pair of two chucks 48 and 48 as the chuck members for holding the wafers are attached to both ends of a slide lock 46. Two push-up plates 62 and 62 are provided in correspondence with the two chucks 48 and 48. The push-up members 62 and the chcuk plates 28 are separated into one set and the other set and used based on the kinds of processes.</p> |
