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发明名称
CONTINUOUS VAPOR DEPOSITION DEVICE
摘要
申请公布号
JPH05287529(A)
申请公布日期
1993.11.02
申请号
JP19920090913
申请日期
1992.04.10
申请人
NKK CORP
发明人
OGATA JUNICHI;OSHIDA EIJI;HAYASHI HIROMASA
分类号
C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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