| 摘要 |
PROBLEM TO BE SOLVED: To sense a gas specimen to be analyzed containing a plurality of gas components simply and easily using a single sensor by equipping a base board on its surface with a surface elastic wave transmitting element consisting of one set of interdigital electrodes and a signal receiving element consisting of one set of interdigital vibrators, and installing a sensitive film between the transmitting element and receiving element. SOLUTION: A base board 1 is equipped on its surface with a surface elastic wave transmitting element 2 consisting of one set of interdigital electrodes and a signal receiving element 3 consisting of one set of interdigital vibrators. Between the two elements 2 and 3 a sensitive film 4 is installed on the base board 1. A frequency oscillator 5 to feed AC signals with variable frequency is connected to the transmitting element 2, while an amplifier to amplify AC signal generated by the receiving element 3 and a calculation part to judge existence of specific gas component(s) from the given signal are connected to the receiving element 3. The material of the board 1 should be electrically insulative and have a low acoustic resistance, and may be any which admits surface propagation of vibrations. The sensitive film 4 may be of any material which reacts with the gas component to be measured or adsorbs such gas component. Analysis of the gas components is made by determining the vibration transmitting amount for each frequency. |
