发明名称 Optical path difference determination method
摘要 The method involves splitting a coherent ray of light (2) into two preferably relatively perpendicularly polarized partial beams (5,6) with identical beams. The partial beams are passed separately through the path to be measured and are subsequently combined to form a combined beam (13) to be evaluated. The polarization of the combined beam is measured. The optical path difference is determined using a vector calculation in response to the phases of two signals.
申请公布号 DE19715232(A1) 申请公布日期 1998.10.15
申请号 DE1997115232 申请日期 1997.04.12
申请人 FRIEDRICH-SCHILLER-UNIVERSITAET JENA, 07743 JENA, DE 发明人 KLEY, ERNST-BERNHARD, DR., 07749 JENA, DE;ZEITNER, UWE DETLEF, DIPL.-PHYS., 99423 WEIMAR, DE;SCHNABEL, BERND, DIPL.-PHYS., 07749 JENA, DE
分类号 G01B9/02;(IPC1-7):G01J9/00;G01J4/00 主分类号 G01B9/02
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