The method involves splitting a coherent ray of light (2) into two preferably relatively perpendicularly polarized partial beams (5,6) with identical beams. The partial beams are passed separately through the path to be measured and are subsequently combined to form a combined beam (13) to be evaluated. The polarization of the combined beam is measured. The optical path difference is determined using a vector calculation in response to the phases of two signals.
申请公布号
DE19715232(A1)
申请公布日期
1998.10.15
申请号
DE1997115232
申请日期
1997.04.12
申请人
FRIEDRICH-SCHILLER-UNIVERSITAET JENA, 07743 JENA, DE