Electromagnetic radiation absorbant crystals of lithium niobate and lithium tantalate and methods of preparing the same

摘要

Crystals of lithium niobate and lithium tantalate are preconditioned to intentionally increase their absorbance of electromagnetic radiation used to expose photoresist applied to the crystals during photolithography. The observed increase in absorbance can reduce the amount of radiation transmitted to the backside of the crystal where the transmitted radiation may be reflected back towards the photoresist and expose undesired portions of the photoresist.