| 摘要 |
PURPOSE:To prevent the distortion of a sample surface shape image by constituting the X-axis, Y-axis and Z-axis direction columnar sections of a scan head with piezoelectric elements. CONSTITUTION:An electrode 38 is mounted onto both axial ends of an X-axis direction scan piezoelectric element section 34, and an electrode 40 is mounted onto a pair of surfaces of a Z-axis direction correction piezoelectric element section 36 at right angles with the axial direction thereof. A probe 18 is perpendicularly fastened to the lower surface of the element section 34 at one end. Also, an electrode 48 is mounted to a pair of sides of a Y-axis direction scan piezoelectric element 46. The probe 18 can scan the surface of a sample 20 in an X-axis direction, when the electrode 38 is applied with voltage. Also, the probe 18 can scan the surface of the sample 20 relatively in a Y-axis direction, when the electrode 48 is applied with voltage. In this case, the columnar sections 34 and 36 are displaced in a Z-axis direction, as well. The displacement, however, can be made nil by applying voltage to the electrode 40. According to the aforesaid construction, the surface shape image of the sample 20 can be prevented from being distorted. |
