SEMICONDUCTOR APPARATUS EQUIPPED WITH STRESS RELAXATION LAMINATED MATERIAL AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: An apparatus is provided to prevent a crack of a conductive layer due to a stress by forming grooves in a surface of the conductive layer to disperse the stress. CONSTITUTION: An interlayer insulation membrane(42) is formed on a substrate and a conductive patterns(44b) is formed on the interlayer insulation membrane(42). Grooves(46) with a narrower width than a distance between the conductive patterns(44b) are formed on the conductive patterns(44b). The grooves(46) are formed in a semi-sphere or a semi-ellipse shape. The widths of grooves(46) are less than one half of the distance between the conductive patterns(44b). The grooves(46) disperse a stress applied to the conductive layer.