| 摘要 |
PROBLEM TO BE SOLVED: To prevent deformation of a vibration eliminator and apparatus provided with it, by providing a pressing force feed back loop for avoiding deforming the eliminator due to application of a useless force and acceleration feed back loop to damp the eliminator after measured vibration frequency of the eliminator. SOLUTION: The inner pressure of an air spring actuator 4 is measured by a pressure measuring means 5 and negatively fed back to a front stage of a voltage-current converter 8 through adequate pressure compensator 14. The vibration of a vibration eliminator 1 is measured by a vibration measuring means 3, its output is fed back through a gain compensator 17 to damp a mechanism according to the fed back value using a newly forward introduced PI compensator 16. For the pressure feed back, and independent loops are assembled every air spring actuator to control the inner pressures of the air spring actuators 4a-4d of axes to avoid deforming or straining a structure including the eliminator 1. |
