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发明名称
EFFUSION CELL, EVAPORATING APPARATUS AND METHOD FOR FORMING THIN FILM
摘要
申请公布号
KR20060095242(A)
申请公布日期
2006.08.31
申请号
KR20050016731
申请日期
2005.02.28
申请人
SAMSUNG SDI CO., LTD.
发明人
KIM, DO GEUN;JUNG, MIN JAE;HUH, MYUNG SOO;JEONG, SEOK HEON
分类号
C23C14/26
主分类号
C23C14/26
代理机构
代理人
主权项
地址
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