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发明名称
ITO sputtering target
摘要
申请公布号
KR100754356(B1)
申请公布日期
2007.08.31
申请号
KR20060114128
申请日期
2006.11.17
申请人
发明人
分类号
H01L21/203;C23C14/34;G02F1/1343
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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