| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatically-driven element high in reliability for operation. SOLUTION: Fixed conductor patterns 3a and 3b are formed on a surface of a board 2, and a movable part 4 is arranged on the upper of the fixed conductor patterns 3a and 3b. A movable conductor pattern 7 is formed on the movable part 4. The movable part 4 is brought into such a state that it is supported and fixed to a fixation part 5 fixed to the board 2 by beams 6a and 6b. Material parts 18 each having an expansion coefficient different from that of the beams 6a and 6b are formed on the beams 6a and 6b, and bent parts 17 each having a shape projecting upward with respect to the board 2 are formed. Top parts of the bent parts 17 abut on a driving fixed electrode 8 in a pressing state; and the bent parts 17 press the movable part 4 toward the board 2 by coming into such a state that the bent parts 17 are elastically deforming toward the board 2. When electrostatic attraction is generated between the movable part 4 and the driving fixed electrode 8, the movable part 4 is displaced toward the driving fixed electrode 8 by using the top parts of the bent parts 17 as support points, and distances between the fixed conductor patterns 3a and 3b and the movable conductor pattern 7 are increased. COPYRIGHT: (C)2008,JPO&INPIT
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