A SURFACE TREATMENT APPARATUS AND PROCESS FOR STAMP

摘要

An apparatus for treating stamp surface and a method thereof are provided to uniformly treat a stamp surface of a large area used for large size substrate manufacture by including a heating part capable of hardening a chemical liquid. A jig(5) is installed in a chamber(10), and arranges one or more stamp(1) inside the chamber. A chemical liquid supply part(20) is installed in one side of the chamber, and supplies a chemical liquid to an inner part of the chamber. A heating part(40) is installed in one side of the chamber. The chemical liquid absorbed on a stamp surface by the heating part is hardened. The jig is composed of a plurality of supporting poles, and forms a plurality of load parts in which the stamp is loaded. A plurality of supporting poles is separated with a constant interval, and circulates the chemical liquid.