Data storage device and methods of manufacturing the same

摘要

Provided are data storage devices and methods of manufacturing the same. The device may include a plurality of cell selection parts formed in a substrate, a plate conductive pattern covering the cell selection parts and electrically connected to first terminals of the cell selection parts, a plurality of through-pillars penetrating the plate conductive pattern and insulated from the plate conductive pattern, and a plurality of data storage parts directly connected to the plurality of through-pillars, respectively. The data storage parts may be electrically connected to second terminals of the cell selection parts, respectively.

主权项

1. A data storage device comprising:
a plurality of cell selection parts formed in a substrate; a plate conductive pattern covering the cell selection parts, the plate conductive pattern electrically connected to first terminals of the cell selection parts; a plurality of through-pillars penetrating the plate conductive pattern, the plurality of through-pillars insulated from the plate conductive pattern; and a plurality of data storage parts connected to the plurality of through-pillars, respectively, wherein the data storage parts are electrically connected to second terminals of the cell selection parts, respectively, wherein the plate conductive pattern has a plurality of plate holes; wherein the plurality of through-pillars pass through the plurality of plate holes, respectively; and wherein the plate holes are spaced apart from each other and form an array of plate holes.