DIFFERENTIAL-TYPE MEMS ACOUSTIC TRANSDUCER

摘要

A MEMS acoustic transducer has: a detection structure, which generates an electrical detection quantity as a function of a detected acoustic signal; and an electronic interface circuit, which is operatively coupled to the detection structure and generates an electrical output quantity as a function of the electrical detection quantity. The detection structure has a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane that faces and is capacitively coupled to a rigid electrode and defines a respective first detection capacitor and second detection capacitor; the electronic interface circuit defines an electrical connection in series of the first detection capacitor and second detection capacitor between a biasing line and a reference line, and further has a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of the first detection capacitor and the second detection capacitor and have a respective first output terminal and second output terminal, between which the electrical output quantity is present.

主权项

1. A MEMS acoustic transducer, comprising:
a detection structure, configured to generate an electrical detection quantity as a function of a detected acoustic signal, wherein said detection structure comprises a first micromechanical structure of a capacitive type and a second micromechanical structure of a capacitive type, each including a membrane which faces and is capacitively coupled to a rigid electrode, said micromechanical structures defining a respective first detection capacitor and second detection capacitor; and an electronic interface circuit, operatively coupled to said detection structure and configured to generate an electrical output quantity as a function of the electrical detection quantity, wherein said electronic interface circuit defines an electrical connection in series of said first detection capacitor and second detection capacitor between a biasing line and a reference line, and further comprises a first single-output amplifier and a second single-output amplifier, which are coupled to a respective one of said first detection capacitor and second detection capacitor and which have a respective first output terminal and second output terminal, between which said electrical output quantity is present.