发明名称 MASK FRAME ASSEMBLY AND THE MANUFACTURING METHOD THEREOF
摘要 According to an embodiment of the present invention, disclosed is a mask frame assembly which comprises: a pattern unit having a pattern hole formed in a mask; and a shape memory alloy unit elongated at the deposition temperature.
申请公布号 KR20160073483(A) 申请公布日期 2016.06.27
申请号 KR20140181616 申请日期 2014.12.16
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 KIM, JEUNG HOON;OH, YOON CHAN;KIM, JANG WOO;NOH, HEE SEAK;PARK, BONG JUN;AN, TAE YONG;JANG, DAE SIK;JEONG, CHEOL GYU;HONG, JAE MIN
分类号 H01L51/56;C23C16/04 主分类号 H01L51/56
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