发明名称 SEMICONDUCTOR SUBSTRATE ARRANGEMENT, A SEMICONDUCTOR DEVICE, AND A METHOD FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
摘要 According to various embodiments, a semiconductor substrate arrangement may be provided, wherein the semiconductor substrate arrangement may include: a semiconductor substrate defining a first area at a first level and a second area next to the first area at a second level, wherein the first level is lower than the second level; a plurality of planar non-volatile memory structures disposed over the semiconductor substrate in the first area; and a plurality of planar transistor structures disposed over the semiconductor substrate in the second area.
申请公布号 US2016211250(A1) 申请公布日期 2016.07.21
申请号 US201514597342 申请日期 2015.01.15
申请人 Infineon Technologies AG 发明人 LANGHEINRICH Wolfram;STRENZ Robert;TEMPEL Georg;STAHRENBERG Knut;HATZOPOULOS Nikolaos;BUKETHAL Christoph;KNOBLOCH Klaus;GRATZ Achim;ROEHRICH Mayk
分类号 H01L27/02;H01L29/16;H01L29/49;H01L27/12;H01L27/115 主分类号 H01L27/02
代理机构 代理人
主权项 1. A semiconductor substrate arrangement comprising: a semiconductor substrate defining a first area at a first level and a second area next to the first area at a second level, wherein the first level is lower than the second level; a plurality of planar non-volatile memory structures disposed over the semiconductor substrate in the first area; and a plurality of planar transistor structures disposed over the semiconductor substrate in the second area.
地址 Neubiberg DE