发明名称 Active shield for capacitive measurement system
摘要 A capacitive measurement system for generating a measurement signal representative of a measured position or distance to a target. The system has a first circuit comprising a thin film capacitive sensor (1a) arranged for providing a sensor capacitance in dependence on the measured position or distance; a cable (30a) comprising a sensor wire (31a) and a co-axial shield conductor (32a), the cable having a remote end and a local end, the sensor wire electrically connected to the capacitive sensor at the local end of the cable; a voltage source (24a) having an output terminal connected to the sensor wire at the remote end of the cable and arranged to energize the capacitive sensor, and energize the shield conductor with essentially the same voltage as the sensor wire; and a current measuring circuit (21a) having first and second input terminals and an output terminal, the current measuring circuit connected in series with the first input terminal connected to the output terminal of the voltage source and the second input terminal connected to the sensor wire at the remote end of the cable, the current measuring circuit arranged to measure current flowing in the sensor wire and generate the measurement signal at the output terminal.
申请公布号 US9400195(B2) 申请公布日期 2016.07.26
申请号 US201213539561 申请日期 2012.07.02
申请人 MAPPER LITHOGRAPHY IP B.V. 发明人 Verburg Cor;Mossel Robert;Padhye Kaustubh Prabodh;de Kok Eric;Vis Willem Jacob
分类号 G01D5/24;G01R27/26;G03F9/00 主分类号 G01D5/24
代理机构 Hoyng Rokh Monegier LLP 代理人 Hoyng Rokh Monegier LLP ;Owen David P.
主权项 1. A capacitive measurement system for generating a measurement signal representative of a measured position or distance to a target, the system having a first circuit comprising: a thin film capacitive sensor arranged for providing a sensor capacitance in dependence on the measured position or distance; a cable comprising a sensor wire and a co-axial shield conductor, the cable having a remote end and a local end, the sensor wire electrically connected to the capacitive sensor at the local end of the cable; a voltage source having an output terminal connected to the sensor wire and to the shield conductor at the remote end of the cable and arranged to energize the capacitive sensor, and to energize the sensor wire and the shield conductor with essentially the same voltage; and a current measuring circuit having first and second input terminals and an output terminal, the current measuring circuit connected in series between the voltage source and the sensing wire, the first input terminal connected to the output terminal of the voltage source and the second input terminal connected to the sensor wire at the remote end of the cable, the current measuring circuit arranged to measure current flowing in the sensor wire and generate the measurement signal at the output terminal.
地址 Delft NL