| 发明名称 |
PIEZOELECTRIC THIN FILM ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC SENSOR, HARD-DISK DRIVE AND INK JET PRINTER DEVICE |
| 摘要 |
The present invention provides a piezoelectric thin film element having a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, wherein the pair of electrode layers are composed of platinum (Pt), oxide particles are contained in at least one of the electrode layers, and the oxide particles are oxide particles of at least one element constituting the piezoelectric thin film or oxide particles of Pt. |
| 申请公布号 |
US2016218271(A1) |
申请公布日期 |
2016.07.28 |
| 申请号 |
US201615006395 |
申请日期 |
2016.01.26 |
| 申请人 |
TDK CORPORATION |
发明人 |
SAKUMA Hitoshi;OHTA Ryu |
| 分类号 |
H01L41/047;G11B5/48;B41J2/14;H01L41/09;H01L41/113 |
主分类号 |
H01L41/047 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A piezoelectric thin film element comprising a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, wherein
the pair of electrode layers are composed of platinum (Pt), oxide particles are contained in at least one of the electrode layers, and the oxide particles are oxide particles of at least one element constituting the piezoelectric thin film or oxide particles of Pt. |
| 地址 |
Tokyo JP |
