| 摘要 |
PROBLEM TO BE SOLVED: To fix a substrate in an appropriate state of a tension caused to the substrate.SOLUTION: A substrate fixing device comprises: clamp parts 12a and 12b that clamp edge parts 101a and 101b of a substrate 100; a moving mechanism 13 that causes a tension to the substrate 100 by moving the clamp part 12b; a driving control part (an electropneumatic regulator 14 and a processing part 17) that executes a driving processing which controls a driving parameter and allows the moving mechanism 13 to drive; and a storing part 16 that is constructed so as to be fixable the substrate 100 and stores a value of the driving parameter having a size so as to cause a previously regulated regulation tension to the substrate 100 as a threshold value Pt. The threshold value Pt is regulated on the basis of an elastic deformable range of the substrate 100 specified by a relation of a moving amount of the clamp part 12b to be moved by the moving mechanism 13 in a state of clamping edge parts 101a and 101b and the value of driving parameter. The driving control part maintains the driving parameter to the threshold value Pt in the driving processing.SELECTED DRAWING: Figure 2 |
