| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin film bulk resonator filter of barium strontium titanate (BST) base.SOLUTION: An acoustic resonator includes a substantially horizontal piezoelectric material membrane, having an upper metal electrode and a lower metal electrode on the upper and lower side faces. The membrane is attached around the peripheral part of the inner sidewall of a rectangular mutual connection frame, by an attachment polymer, and the sidewall of a package frame is substantially perpendicular to the membrane, and including a conductive via in the dielectric base material. The conductive via extends substantially perpendicularly in the sidewall. The metal electrode is coupled conductively with the metal via by a feature layer covering the upper side face of the membrane. An upper lid and a lower lid are connected with the upper end and bottom end of the mutual connection frame, so as to seal the acoustic resonator from the circumference thereof.SELECTED DRAWING: Figure 2 |
