YAW RATE SENSOR AND METHOD FOR OPERATING A YAW RATE SENSOR

摘要

The present invention relates to a yaw rate sensor comprising: a substrate having a main extension plane; and a Coriolis element in which the yaw rate sensor is configured such that the Coriolis element is excitable with an aid of an excitation arrangement to carry out an excitation oscillation along a first direction and in parallel to the main extension plane, the rotation rate sensor including a compensation element to exert a compensation force, and the compensation force having a non-linear dependence on the excitation oscillation.