Device and method for a LDMOS design for a FinFET integrated circuit

摘要

Semiconductor devices and methods for manufacturing an LDMOS FinFET integrated circuit. The intermediate semiconductor device includes a substrate, a first well in the substrate, a second well in the substrate, and at least two polysilicon gates. The first well overlaps the second well and the at least one first gate is disposed over the first well and at least one second gate is disposed over the second well. The method includes forming a channel region and a drift region in the substrate, wherein the channel region overlaps the drift region, forming a shallow trench isolation region in the drift region, forming at least one first gate over the channel region, forming at least one second gate over the shallow trench isolation region, and applying at least one metal layer over the at least one first gate and the at least one second gate.

主权项

1. An intermediate semiconductor device, comprising:
a substrate; a first well extending into the substrate; a second well extending into the substrate, wherein the first well overlaps the second well; a shallow trench isolation region extending into a first portion of the second well; a first region extending below a top surface of the first well such that at least a portion thereof overlaps the first well, wherein the first region is selected from a source region and a drain region; a second region extending below a top surface of a second portion of the second well such that at least a portion thereof overlaps the second well, wherein the second region is selected from a source region and a drain region, and wherein the first and second portions of the second well are spaced from each other such that a portion of the second well extends between the shallow trench isolation region and the second region; at least one first implant disposed within the device such that a portion thereof is aligned with the first region to selectively reduce a resistance of the first region; at least one second implant disposed within the device such that a portion thereof is aligned with the second region to selectively reduce a resistance of the second region; and at least two polysilicon gates, wherein at least one first gate is disposed on the first well and at least one second gate is disposed on the second well.