| 摘要 |
PURPOSE: To enable immediate disassembly of a vacuum container in the case of fault at a device and to enable reassembling, without using vacuum pumps by forming a recessed part for housing a cold head on a heat conduction plate arranged in thermal contact with the cold head, and elastically partially attaching a logic unit through an elastic supporting part to the cold head. CONSTITUTION: A system 10 is composed of a cryogenic cooling unit 12, exchangeable on the spot and a logic unit 14, and the logic unit 14 is provided with a dome-shaped vacuum container 16. A low wall part 22 supports a cylindrical recessed part 24. A heat-transmitting plate 28 at the recessed part 24 supports a chip carrier 30, and this carrier supports logic chips 32 of computers containing one or more respectively including semiconductor integrated circuits. A screw is provided over one part or the entire part of a boundary surface 60, between a cryogenic cooling cold head 42 and a side wall part 26 of the recessed part 24, and these two sections can be screwed together. |
