| 摘要 |
<p>PURPOSE:To obtain a humidity sensor low in a resistance value and having high accuracy and high reliability by using a heat-treated product of a lithium salt solution having silica particles dispersed therein as a humidity-sensitive body. CONSTITUTION:40ml of 0.02N hydrochloric acid and 15g of a fine silica powder are added to 50 ml of tetraethoxysilane to prepare a lighium salt solution having silica particles dispersed therein and aqueous ammonia is added to this solution to gel the same and this gel is dried at 60 deg.C for two days and subse quently heat-treated at 800 deg.C for one hr to form a heat-treated product. A rectangular parallelepiped 1 with a dimension of 10 X 10 X 5 mm is cut from the product and an electrode 2 is attached thereto. This sensor is low in a resistance value and enhanced in accuracy and reliability because it generates no characteristic change due to temp. and easy to use.</p> |
