| 摘要 |
PURPOSE:To prevent the damage of window members and to suppress a gas leak to the minimum, even if a gas should escape, by detecting the pressure increase in an equipment body due to thermorunaway through a pressure sensor to interrupt a power supply and by causing a shutoff valve to close before, even if said window members should be destroyed. CONSTITUTION:At the time of a normal operation, a laser light 17 amplified by CO2 gas in an equipment body 11 permeates successively through window members 15a, 15b via in- and outlet hole 12 and is projected to the outside. If thermorunaway should occur, the pressure increase in the equipment body 11 is detected by a sensor 18 on the basis of the deformation of the inside window member 15a, the generation of a crack or the like and a switching means operates so that a laser power supply 22 is interrupted and the destruction of the window member 15a is prevented beforehand. Even if the window members 15a, 15b should be destroyed, a shutoff valve 25 is caused by the control of a controller 23 to close before at high speed so that outward scattering of broken pieces, discharge of laser gas, etc., are prevented and safety is secured. |
