| 摘要 |
<p>PURPOSE:To make it possible to detect immediately a broken state of a cantilever when it is broken, by a construction wherein a part of a connection circuit connected with a thick-film strain gage is extended to a flexible part of the cantilever by a thick-film baked circuit. CONSTITUTION:A circuit pattern 19 connected with a thick-film strain gage 17 is extended to the surface of a tongue-piece-shaped cantilever 16 of a cantilever structure formed of a plate material made of ceramic, from the base part of the cantilever 16 to the free end part thereof, and in addition, the pattern 19 is formed of a thick-film baked circuit. When the cantilever 16 is broken by a stress or the like of an acceleration sensor constructed of these components due to along-time use thereof, for instance, accordingly, the pattern 19 connected with the gage 17 is cut with the breakage and the sensor turns to fail to make an output. The breakage of the sensor can be detected therefrom immediately.</p> |
