| 摘要 |
PURPOSE:To enable a plurality of measurements to be made highly accurately by measuring jitter from output of second and third trigger sensors and measuring projection and recess of the face from an output of first and second light position detectors when a first trigger sensor is output. CONSTITUTION:A light L1 from a light source 1 is collected on a polygon mirror surface 19a through concave and convex lenses 4 and 6 and a cylindrical lens (CL) 5. The reflection light enters trigger sensors 8 and 10 through CL 7 and 9 when a mirror 19 is rotated to the left. At this time, lights L3 and L5 from light sources 2 and 3 are reflected on the mirror surface 19a through optical systems, enter light positioned detectors 15 and 18, and output of the detectors 15 and 18 at the point when there is output from the sensors 8 and 10 is sent to a computer. Then, the output of the detectors 15 and 18 is calculated by a computer, thus enabling amount of the inclination of the surface and that of recess and projection to be output. Then, the light L1 enters a trigger sensor 12 through CL11 and jitter is obtained from time difference of generation of output signal of the sensors 10 and 12. |
