| 摘要 |
PURPOSE:To heighten the accuracy of element identification by displaying dissimilar spectra obtained by a wavelength dispersion type X-ray spectroscope WDS and an energy dispersion type X-ray spectroscope EDS in one uniform unit, and comparing both spectra. CONSTITUTION:As compared with an energy dispersion type X-ray spectroscope EDS, a wavelength dispersion type X-ray spectroscope WDS has good resolving power, but includes higher ray, so that even light elements from Be to 0 can be detected with comparatively good sensitivity. Accordingly, WDS spectrum and EDS spectrum which have some different spectral crystals are displayed on the same CRT to compare and examine both spectra. Especially, if markers of WDs and EDS are displayed at the same time, both characteristics of WDS and EDS spectra are utilized so as to effectively identify elements as such whether corresponding elements are contained in both spectra obtained from the same material or not. |
