| 摘要 |
PURPOSE:To contrive reduction of defectively formed pattern by a method wherein, when the solvent dripping on a semiconductor substrate is shaked off by centrifugal force, a light-shielding sensor, with which the solvent scattering toward the upper part of the cup, is arranged on the upper part of the cup. CONSTITUTION:Gas 5, with which a semiconductor substrate 1 is vacuum-sucked into a cup and centrifugal force is worked for rotation of the substrate 1 by the driving force of a pulse motor, and a nozzle 3, with which a solvent is dripped or sprayed on the substrate, are provided on the title device. Moreover, a mist-detecting light shielding sensor 9 is provided on the upper part of the cup 4, and a liquid outlet 7 and an exhaust hole 8 are provided on the lower cup 6. At this point, when the displacement is decreased, the mist scattered from the substrate 1 flies up by the wind generated by the centrifugal force of the gas 5, the rotation of the pulse motor 2 is controlled by detecting the blown up mist, or the dripping of the solvent is controlled, and the successive occurrence of defective pattern is prevented. As a result, the decrease in formation of defective pattern can be achieved. |
