REMOVING APPARATUS OF EXHAUST GAS,申请号JP19770014377-传众专利搜索

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发明名称	REMOVING APPARATUS OF EXHAUST GAS
摘要	<p>PURPOSE:The above mentioned apparatus, being able to carry out continuous operation without clogging etc. and taken in metal material able to make alloy with Si, reacting with gas, containing Si(compound) in high temperature state.</p>
申请公布号	JPS5399071(A)	申请公布日期	1978.08.30
申请号	JP19770014377	申请日期	1977.02.10
申请人	NIPPON ELECTRIC CO	发明人	TANNO YUKINOBU
分类号	B01D53/46;B01D53/34;C01B33/02;C01B33/029;C01B33/04;H01L21/20;H01L21/205	主分类号	B01D53/46
代理机构		代理人
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