| 摘要 |
<p>PURPOSE:To make it usable even in a vacuum atmosphere and enable the works to be chucked regardless of their form by probiding a tip part of each claw with a socalled static pressure gas bearing in a chuck device to be composed of a plurality of movable claws so as to chuck the works in a noncontact state by this bearing. CONSTITUTION:A plurality of claws 1 move to the side of the works holding center L so as to be located in a closed position in order to discharge gas from the gas discharge parts 3 of a gas film generation means 6 toward the works W on the pedestales 2. This gas generates a gas film of a fixed pressure having a film thickness to be fixed by a balance between dead weight of the works W and a pressure of gas between the surfaces of the pedestales 2 and the under surfaces of the works as well as between the inner surfaces of the claws 1 and the outer side of the works W respectively, the works W are held in a state off the claws 1 and their pedestals as well so as to be chucked on a noncontact state. Thereby, the works W can be chucked not only in an atmospheric pressure and a high-pressure atmosphere but also in a vacuum atmosphere while being able to be chucked even when the works are shaped except in a plate shape.</p> |
