| 摘要 |
PURPOSE:To uniformly and efficiently treat a powder such as pigment, by applying low temp. plasma treatment to the powder due to RF discharge while the powder is stirred under vibration to perform the treatment of the powder. CONSTITUTION:After a powder to be treated is introduced into a treatment chamber 1 from a batch 1a, the air in the treatment chamber 1 is discharged from an exhaust pipe 6 in the direction shown by an arrow by an exhaust system to reduce the internal pressure of the chamber to about 10<-1>-10<-2>Torr. When a motor 5 is rotated at a high speed under a condition of 600-2,400rpm (vibration frequency; 10-40Hz) and amplitude of 2-10mm, the powder in the treatment chamber 1 moves by high speed rotary vibration while receiving impact shearing action. Subsequently, an RF powder source 11 is operated to apply RF to an electrode 8 and the gas present in the treatment chamber 1 is excited to generate a low temp. plasma atmosphere. After treatment for a definite time, the application of RF and vibration are stopped and the treatment chamber is returned to atmospheric pressure to obtain the treated powder. |
