| 摘要 |
PURPOSE:To prevent impurity from entering a laser case so as to dispense with the passivation of the laser case by a method wherein apart from the case, a gas supply piping is evacuated to remove the impurity therein and then gas is supplied. CONSTITUTION:Solenoid valves 7, 8, and 13 are closed so as to separate a laser case from a gas supply system, and gas bombs 2-4 are exchanged. A solenoid valve 12 connected to the newly-provided bombs is opened, and when a bypass which connects the piping with a vacuum pump is opened, impurity gas left inside the piping is discharged through the bypass. The valve 12 is closed after the piping is sufficiently evacuated, and only the proper gas is sent into the gas supply piping when the gas bombs are opened. By these processes, impurity is prevented from entering the laser case, so that the laser is prevented from decreasing in an output. And, a large amount of gas used for the passivation of the laser case can be dispensed with. |
