Manufacturing method for integrated, planar, optical structures

摘要

The method uses a photolithographic process to form structure grooves with adjacent storage troughs for planar optical structures on a substrate material. The grooves are filled with liquid photopolymer from the storage troughs. After hardening the photopolymer is surrounded by a metal film. Preferably, a film with a smaller refractive index than the photopolymer is deposited on a substrate surface. Typically a single or multilayer lacquer film is used in the lithographic manufacturing step. The liquid photopolymer may be applied to the grooves by capillary forces.