| 摘要 |
PROBLEM TO BE SOLVED: To improve performance and practicability by piezoelectrically detecting curvature strain due to rotating movement of four vibration legs excited so as to perform vertical bending vibration, and using constitution gathering lead wires of electrodes in a pad group. SOLUTION: A cross type vibrator 3 is composed of constant elasticity metal material, has four legs A, B, C, D which are excited in a fundamental vibration mode perpendicular to the cross surface, and is supported on a substrate 10. When the whole of the vibrator 3 is rotated around a longitudinal direction rotating shaft of the leg, Colioli's force in proportion to angular velocity is generated. A voltage of a piezoelectric element 5 which is generated by vibration strain is supplied to a piezoelectric element 4, and maintains the fundamental vibration of the cross type vibrator 3. From a detection voltage of each electrode of the piezoelectric element 4, an angular velocity detection output is obtained. An IC 7 of a detection-driving circuit is mounted on a small substrate 6 on the upper end of a retainer 9. A bonding pad 61 on the small substrate 6 is connected with terminals in the peripheral part of the IC 7 and electrode films (a), (b) of the piezoelectric element 4 by using bonding wires 8, and connected with electrode films of the piezoelectric element 5 by using lead wires. |
