| 摘要 |
PROBLEM TO BE SOLVED: To carry out high precision recording by making focusing easy and accurate for the electron beam to the original 1 in an electron beam irradiation device that makes recording by irradiating the original 1 with the electron beam. SOLUTION: On the slide table 6 of a support mechanism 2 which supports the original 1, a focusing stage 30 is provided at the side adjacent to the original 1. When recording, the electron beam is first irradiated to the focusing stage 30 for focusing, then to the original 1 for recording.
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