APPARATUS FOR SEALING OF REACTOR CHAMBER

摘要

PURPOSE: An apparatus for sealing of reactor chamber is provided to improve a sealing characteristic by using a double structure including the first ring of low density and the second ring of high density. CONSTITUTION: An apparatus for sealing of a reactor is used for shielding an opening(50) between a transfer chamber(20) and a reactor chamber(30) by using a slit door(40). The apparatus for sealing has a double structure of the first and the second ring(61,62). The first ring(61) is installed between the slit door(40) and an outer circumference of the reactor chamber(30) of the opening(50). The first ring(61) is formed by Teflon of low density. The second ring(62) is installed on the outside of the first ring(61). The second ring(62) is formed by karlez of high density. An area of the slit door(40) doubles the area of opening(50).